Optical MEMS or MOEMS Enabling Advanced Technologies: Augmented Reality, Mini-Spectrometers, Lidar, and Wearable Healthcare

Introduction The rapid progress in modern microelectronics has resulted in impressive computational and memory capabilities. However, bridging the gap between digital systems and the physical world has remained a challenge. This is where MicroElectroMechanical Systems (MEMS) and even smaller Nano ElectroMechanical Systems (NEMS) come into play. These technologies integrate sensors and actuators with microelectronic circuitry,…