Amalga™: an Next generation MEMS manufacturing technology for miniature RF Components

Mechanical-Systems (MEMS) is the integration of mechanical elements (levers, springs, deformable membranes, vibrating structures, etc.), sensors, actuators, and electronics (resistors, capacitors, inductors, etc.) on a common silicon substrate through microfabrication technology. MEMS devices are today considered as one among the most promising technologies of this century, capable to revolutionize the industrial world and the commercial…